A New Approach for Microfabrication of Printed Circuit Boards with Ultrafine Traces.

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ID: 66509
2019
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Abstract
The advances in micro/nanofabrication techniques have enabled miniaturization of printed circuit boards (PCBs) for various applications such as portable devices, smart sensors, and IoTs, to name a few. PCBs provide electrical connectivity between the components as well as mechanical support. Down-scaling of PCBs is crucial for miniaturization of large systems and devices. Currently, microtraces down to 25 μm can be microfabricated with the current microfabrication processes at an industrial scale. In the present work, we report a new approach for microfabrication of PCBs with trace widths down to 3 μm on commercially available PCB substrates. We used electroplating/electroetching, sputtering, and photolithography to achieve these fine trace sizes. The proposed fabrication technique can be used in microelectronics, system on chip, MEMS, and miniaturized circuits and systems in general.
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mirvakili2019aacs Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Mirvakili, Seyed M;Broderick, Kurt;Langer, Robert S;
Journal ACS applied materials & interfaces
Year 2019
DOI
10.1021/acsami.9b08761
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