Design and Fabrication of Full Wheatstone-Bridge-Based Angular GMR Sensors

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ID: 60126
2018
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Abstract
Since the discovery of the giant magnetoresistive (GMR) effect, GMR sensors have gained much attention in last decades due to their high sensitivity, small size, and low cost. The full Wheatstone-bridge-based GMR sensor is most useful in terms of the application point of view. However, its manufacturing process is usually complex. In this paper, we present an efficient and concise approach to fabricate a full Wheatstone-bridge-based angular GMR sensor by depositing one GMR film stack, utilizing simple patterned processes, and a concise post-annealing procedure based on a special layout. The angular GMR sensor is of good linear performance and achieves a sensitivity of 0.112 mV/V/Oe at the annealing temperature of 260 °C in the magnetic field range from −50 to +50 Oe. This work provides a design and method for GMR-sensor manufacturing that is easy for implementation and suitable for mass production.
Reference Key
yan2018designsensors Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Yan, Shaohua;Cao, Zhiqiang;Guo, Zongxia;Zheng, Zhenyi;Cao, Anni;Qi, Yue;Leng, Qunwen;Zhao, Weisheng;
Journal sensors
Year 2018
DOI
DOI not found
URL
http://www.mdpi.com/1424-8220/18/6/1832
Keywords
microscopy Materials of engineering and construction. Mechanics of materials Technology (General) Chemical technology Engineering (General). Civil engineering (General) Technology Electrical engineering. Electronics. Nuclear engineering Descriptive and experimental mechanics electronic computers. computer science heat

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