Advanced Micro- and Nano-Gas Sensor Technology: A Review.

Clicks: 163
ID: 54238
2019
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Abstract
Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past, several micro- and nano-gas sensors have been proposed and investigated where each type of sensor exhibits various advantages and limitations in sensing resolution, operating power, response, and recovery time. This paper presents an overview of the recent progress made in a wide range of gas-sensing technology. The sensing functionalizing materials, the advanced micro-machining fabrication methods, as well as their constraints on the sensor design, are discussed. The sensors' working mechanisms and their structures and configurations are reviewed. Finally, the future development outlook and the potential applications made feasible by each category of the sensors are discussed.
Reference Key
nazemi2019advancedsensors Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Nazemi, Haleh;Joseph, Aashish;Park, Jaewoo;Emadi, Arezoo;
Journal sensors
Year 2019
DOI
E1285
URL
Keywords
volatile organic compound (voc) acoustic gas sensors carbon nano-tube (cnt) sensors electrochemical gas sensors fiber-optic gas sensors metal oxide semiconductor (mos) sensors micro-electro mechanical systems (mems) organic-based chemiresistive gas sensors photonic crystal gas sensors piezoelectric gas sensors

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