Effect of multi-functional amines on SiGe surface finish during chemical mechanical polishing

Clicks: 200
ID: 54199
2019
Article Quality & Performance Metrics
Overall Quality Improving Quality
0.0 /100
Combines engagement data with AI-assessed academic quality
AI Quality Assessment
Not analyzed
Abstract
Abstract is not available for this article.
Login to Search Abstract
Reference Key
yang2019effectmaterials Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Yang, S.
Journal Materials Science in Semiconductor Processing
Year 2019
DOI
10.1016/j.mssp.2019.04.023
URL
Keywords Keywords not found

Citations

No citations found. To add a citation, contact the admin at info@scimatic.org

Comments

No comments yet. Be the first to comment on this article.