Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages
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ID: 36930
2019
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Abstract
By laser micromilling technology it is possible to fabricate custom MEMS microhotplate platform and also SMD package for MOX sensor, that gives complete solution for integration in mobile devices-smart phones, tablets and etc. The 3D design and fabrication of MEMS microhotplates and packages products occurs simultaneously that give opportunity for ultra-fast time making unique solutions for MOX sensors (number of microhotplates, hot spot size on microhotplates, diameter holes in package cap and etc.) without looking at standard solutions (primarily the package type).
| Reference Key |
samotaev2019rapidproceedings
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| Authors | Samotaev, Nikolay; |
| Journal | proceedings |
| Year | 2019 |
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| Keywords | Keywords not found |
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