Critical Excitation Energy-Based Method for Chemical Bonding State Analysis Using SEM–EDS

Clicks: 1
ID: 328319
2026
Article Quality & Performance Metrics
Overall Quality
Not rated
Combines reader engagement with the AI quality analysis. This article has not been analysed, so there is no overall score — reader engagement is measured and shown alongside.
AI Quality Assessment
Not analyzed
Readership in this journal

Ranked #26 of 26 articles by views in Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

Most read Least read

Bar heights use a square-root scale.

Mint this article as an NFT
Not yet minted

Create a permanent, verifiable on-chain record of this article on the Scimatic Network. The NFT is held in your Journament account, and you can withdraw it to your own wallet at any time.

5 SUSD one-off · no wallet required
Abstract
In this study, we investigate the feasibility of evaluating the chemical bonding states using an electron-beam-based spectroscopic method implemented on a conventional scanning electron microscope and energy dispersive X-ray spectroscopy (SEM-EDS) system. The widely used surface-sensitive techniques such as X-ray absorption spectroscopy (XAS) often require synchrotron facilities and are not suitable for localized measurements. The critical excitation energies of silicon and silicon oxide featuring distinct absorption edge energies in XAS were determined by measuring the onset of characteristic X-ray emission as a function of incident electron energy. The observed difference in the critical excitation energy is consistent with the reported chemical shifts in the Si 1s binding energies and Si-K absorption edge energies. Systematic evaluations confirmed that variations in the beam current, instrumental instability, and surface charge-up did not significantly affect the measured thresholds. These results indicate that the proposed method captures chemically sensitive information related to the core-level electronic structure. The proposed approach provides a simple and accessible alternative to probe chemical bonding states and offers potential advantages for localized analysis because of the small probe size achievable with electron beams.
Reference Key
openalex_W7212048314 Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Yasuhiro Takatani, Noritake Isomura, Satoru Kosaka, Toshikazu Satoh
Journal Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
Year 2026
DOI
10.1093/jmicro/dfag033
URL
Keywords Keywords not found

Citations

No citations found. To add a citation, contact the admin at info@scimatic.org

No comments yet. Be the first to comment on this article.