Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate
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ID: 274255
2021
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Abstract
Request PDF | Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate | The present study focuses on controlling the antireflective (AR) characteristics of one-dimensional moth eye structures on a high-resistivity... | Find, read and cite all the research you need on ResearchGate
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| Reference Key |
yu2021opticsprofile
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| Authors | Xi Yu;Yuki Yasunaga;Kazusa Goto;Dejun Liu;Shingo Ono; |
| Journal | optics and lasers in engineering |
| Year | 2021 |
| DOI |
http://dx.doi.org/10.1016/j.optlaseng.2021.106584
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| URL | |
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