Preliminary Study on Fluidized Bed Chemical Mechanical Polishing (FB-CMP) Process for Stainless Steel 304 (SS304)
Clicks: 203
ID: 273176
2020
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Abstract
Fluidized bed machining (FBM) is used for the surface finishing or cleaning of complex 3D machine parts. FBM is a process of injecting air into a chamber to encourage particles into a fluid-like state. Subsequently, FBM involves rotating the specimen at high speed to process the surface of the mater …
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| Reference Key |
t2020micromachinespreliminary
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| Authors | Kim T;Lee H;; |
| Journal | micromachines |
| Year | 2020 |
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