Size Effects in Internal Friction of Nanocrystalline Aluminum Films

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ID: 269753
2021
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Abstract
Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to investigate the quasi-static properties of Al thin film at room temperature under high vacuum conditions at microscopic scales. Energy loss was determined using a decay technique in the oscillation amplitude of a vibrating structure following resonant excitation. Grain size and film thickness size were strictly controlled considering the quasi-static properties of the films. This study found that the internal friction of ultra-thin and thin Al films was more dependent on the grain boundaries than film thickness.
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Authors Nhat Minh Dang;Zhao-Ying Wang;Yun-Chia Chou;Tra Anh Khoa Nguyen;Thien Ngon Dang;Ming-Tzer Lin;Dang, Nhat Minh;Wang, Zhao-Ying;Chou, Yun-Chia;Nguyen, Tra Anh Khoa;Dang, Thien Ngon;Lin, Ming-Tzer;
Journal Materials (Basel, Switzerland)
Year 2021
DOI
10.3390/ma14123401
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