Silk as a biodegradable resist for field-emission scanning probe lithography.

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ID: 264831
2020
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Abstract
The patterning of silk allows for manufacturing various structures with advanced functionalities for optical and tissue engineering and drug delivery applications. Here, we propose a high-resolution nanoscale patterning method based on field-emission scanning probe lithography (FE-SPL) that crosslinks the biomaterial silk on conductive indium tin oxide (ITO) promoting the use of a biodegradable material as resist and water as a developer. During the lithographic process, Fowler-Nordheim electron emission from a sharp tip was used to manipulate the structure of silk fibroin from random coil to beta sheet and the emission formed nanoscale latent patterns with a critical dimension (CD) of ∼50 nm. To demonstrate the versatility of the method, we patterned standard and complex shapes. This method is particularly attractive due to its ease of operation without relying on a vacuum or a special gaseous environment and without any need for complex electronics or optics. Therefore, this study paves a practical and cost-effective way toward patterning biopolymers at ultra-high level resolution.
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bicer2020silknanotechnology Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Bicer, Mahmut;Kumar, B Ganesh;Melikov, Rustamzhon;Bakis Dogru, I;Sadeghi, Sadra;Rangelow, Ivo W;Alaca, B Erdem;Nizamoglu, Sedat;
Journal Nanotechnology
Year 2020
DOI
10.1088/1361-6528/ab99f5
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