Silicon carbide double-microdisk resonator.

Clicks: 284
ID: 24296
2019
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Abstract
We demonstrate the first silicon carbide (SiC) double-microdisk resonator (DMR). The device has a compact footprint with a radius of 24 μm and operates in the ITU high frequency range (3-30 MHz). We develop a multi-layer nanofabrication recipe that yields high optical quality (Q∼10) for the SiC DMR. Because of its strong optomechanical interaction, we observe the thermal-Brownian motions of mechanical modes in a SiC DMR directly at room temperature for the first time, to the best of our knowledge. The observed mechanical modes include fundamental/second-order common modes and fundamental differential (D1) modes. The D1 modes have high mechanical qualities >3800 at around 18.4 MHz tested in vacuum. We further show that optomechanical interactions, including linear and nonlinear optomechanical spring effects, can be observed in a SiC DMR at sub-milliwatt optical power. The SiC DMR has great potential for low-power optomechanical sensing applications in harsh environments.
Reference Key
lu2019siliconoptics Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Lu, Xiyuan;Lee, Jonathan Y;Rogers, Steven D;Lin, Qiang;
Journal optics letters
Year 2019
DOI
10.1364/OL.44.004295
URL
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