minimally intrusive optical micro-strain sensing in bulk elastomer using embedded fabry-pérot etalon

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ID: 238161
2016
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Abstract
A variety of strain sensors have been developed to measure internal deformations of elastomeric structures. Strain sensors measuring extremely small mechanical strain, however, have not yet been reported due mainly to the inherently intrusive integration of the sensor with the test structure. In this work, we report the development of a minimally intrusive, highly sensitive mechanical strain transducer realized by monolithically embedding a Fabry-Pérot (FP) etalon into a poly(dimethylsiloxane) (PDMS) block test structure. Due to the extreme sensitivity of the FP resonance condition to the thickness of the spacer layer between the two reflectors, the limit of detection in the mechanical deformation can be as low as ~110 nm with a 632.8 nm laser used as the probing light. The compatibility of PDMS with additive fabrication turned out to be the most crucial enabling factor in the realization of the FP etalon-based strain transducer.
Reference Key
paek2016micromachinesminimally Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Jungwook Paek;Qiang Li;In Ho Cho;Jaeyoun Kim
Journal chemistryopen
Year 2016
DOI
10.3390/mi7040061
URL
http://www.mdpi.com/2072-666X/7/4/61
Keywords
pdms strain sensing

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