mems gyroscopes based on acoustic sagnac effect

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ID: 230808
2016
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Abstract
This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS) device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.
Reference Key
yu2016micromachinesmems Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Yuanyuan Yu;Hao Luo;Buyun Chen;Jin Tao;Zhihong Feng;Hao Zhang;Wenlan Guo;Daihua Zhang
Journal chemistryopen
Year 2016
DOI
10.3390/mi8010002
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