locally-actuated graphene-based nano-electro-mechanical switch

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ID: 217436
2016
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Abstract
The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements.
Reference Key
sun2016micromachineslocally-actuated Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Jian Sun;Manoharan Muruganathan;Nozomu Kanetake;Hiroshi Mizuta
Journal chemistryopen
Year 2016
DOI
10.3390/mi7070124
URL
http://www.mdpi.com/2072-666X/7/7/124
Keywords
graphene nano-electro-mechanical switch

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