strain effects by surface oxidation of cu3n thin films deposited by dc magnetron sputtering

Clicks: 183
ID: 213856
2017
Free PDF
Article Quality & Performance Metrics
Overall Quality
Not rated
Combines reader engagement with the AI quality analysis. This article has not been analysed, so there is no overall score — reader engagement is measured and shown alongside.
AI Quality Assessment
Not analyzed
Readership in this journal
Steady

Ranked #45 of 58 articles by views in die pharmazie

Most read Least read

Bar heights use a square-root scale.

Mint this article as an NFT
Not yet minted

Create a permanent, verifiable on-chain record of this article on the Scimatic Network. The NFT is held in your Journament account, and you can withdraw it to your own wallet at any time.

5 SUSD one-off · no wallet required
Sign in to mint
Abstract
We report the self-buckling (or peeling off) of cubic Cu3N films deposited by DC magnetron sputtering of a Cu target in a nitrogen environment at a gas pressure of 1 Pa. The deposited layer partially peels off as it is exposed to ambient air at atmospheric pressure, but still adheres to the substrate. The chemical composition of the thin film as investigated by means of X-ray photoelectron spectroscopy (XPS) shows a considerable surface oxidation after exposure to ambient air. Grazing incidence X-ray diffraction (GIXRD) confirms the formation of a crystalline Cu3N phase of the quenched film. Notable are the peak shifts in the deposited film to smaller angles in comparison to stress-free reference material. The X-ray pattern of Cu3N exhibits clear differences in the integral width of the line profiles. Changes in the film microstructure are revealed by X-ray diffraction, making use of X-ray line broadening (Williamson–Hall and Stokes–Fourier/Warren–Averbach method); it indicates that the crystallites are anisotropic in shape and show remarkable stress and micro-strain.
Reference Key
majumdar2017coatingsstrain Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Abhijit Majumdar;Steffen Drache;Harm Wulff;Arun Kumar Mukhopadhyay;Satyaranjan Bhattacharyya;Christiane A. Helm;Rainer Hippler
Journal die pharmazie
Year 2017
DOI
10.3390/coatings7050064
URL
http://www.mdpi.com/2079-6412/7/5/64
Keywords
civil engineering (general) crystal structureengineering (general)

Citations

No citations found. To add a citation, contact the admin at info@scimatic.org

Comments

No comments yet. Be the first to comment on this article.