fabrication and characterization of hydrophilic tio2 thin films on unheated substrates prepared by pulsed dc reactive magnetron sputtering

Clicks: 173
ID: 212742
2010
Article Quality & Performance Metrics
Overall Quality
Not rated
Combines reader engagement with the AI quality analysis. This article has not been analysed, so there is no overall score — reader engagement is measured and shown alongside.
AI Quality Assessment
Not analyzed
Readership in this journal
Popular

Ranked #206 of 443 articles by views in reproductive biology and endocrinology

Most read Least read

Bar heights use a square-root scale. Only the 120 most-read articles are drawn; the journal has 443 in total.

Mint this article as an NFT
Not yet minted

Create a permanent, verifiable on-chain record of this article on the Scimatic Network. The NFT is held in your Journament account, and you can withdraw it to your own wallet at any time.

5 SUSD one-off · no wallet required
Abstract
TiO2 thin films were deposited on unheated silicon wafers (100) and glass slides by a pulsed DC reactive magnetron sputtering in an ultrahigh vacuum (UHV) system. The effects of both an operating pressure and deposition time on film structure, surface morphology, and optical property were studied. The film structure and microstructure were characterized by grazing-incidence X-ray diffraction (GIXRD) technique and transmission electron microscopy (TEM). The surface morphology was investigated by field emission scanning electron microscopy (FE-SEM). The optical property of the TiO2 thin films was determined by spectroscopic ellipsometry (SE). The water contact angle measurement was also used to determine hydrophilicity of the films after exposed to UV light. The results suggested that the TiO2 thin film at less than 40 nm was amorphous. As the thickness was increased, the mixture of anatase and rutile phases of TiO2 began to form. By reducing the operating pressure during the film deposition, the rutile phase component can also be enhanced. Both the increased film thickness and decrease operating pressure were the critical factors to improve the hydrophilicity of the TiO2 thin films.
Reference Key
horprathum2010journalfabrication Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;M. Horprathum;P. Chindaudom;P. Limnonthakul;P. Eiamchai;N. Nuntawong;V. Patthanasettakul;A. Pokaipisit;P. Limsuwan
Journal reproductive biology and endocrinology
Year 2010
DOI
10.1155/2010/841659
URL
Keywords

Citations

No citations found. To add a citation, contact the admin at info@scimatic.org

No comments yet. Be the first to comment on this article.