gas nozzle effect on the deposition of polysilicon by monosilane siemens reactor
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ID: 211505
2012
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Abstract
Deposition of polysilicon (poly-Si) was tried to increase productivity of poly-Si by using two different types of gas nozzle in a monosilane Bell-jar Siemens (MS-Siemens) reactor. In a mass production of poly-Si, deposition rate and energy consumption are very important factors because they are main performance indicators of Siemens reactor and they are directly related with the production cost of poly-Si. Type A and B nozzles were used for investigating gas nozzle effect on the deposition of poly-Si in a MS-Siemens reactor. Nozzle design was analyzed by computation cluid dynamics (CFD). Deposition rate and energy consumption of poly-Si were increased when the type B nozzle was used. The highest deposition rate was 1 mm/h, and the lowest energy consumption was 72 kWh⋅kg-1 in this study.
| Reference Key |
kang2012internationalgas
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|---|---|
| Authors | ;Seung Oh Kang;Uk June Lee;Seung Hyun Kim;Ho Jung You;Kun Park;Sung Eun Park;Jong Hoon Park |
| Journal | construction and building materials |
| Year | 2012 |
| DOI |
10.1155/2012/697653
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