spatio-temporal proximity characteristics in 3d μ-printing via multi-photon absorption
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ID: 205022
2016
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Abstract
One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect.
| Reference Key |
waller2016polymersspatio-temporal
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|---|---|
| Authors | ;Erik Hagen Waller;Georg von Freymann |
| Journal | Journal of Fluorescence |
| Year | 2016 |
| DOI |
10.3390/polym8080297
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| URL | |
| Keywords | Keywords not found |
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