scanning optical head with nontilted reference beam: assuring nanoradian accuracy for a new generation surface profiler in the large-slope testing range

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ID: 177447
2011
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Abstract
Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of ∼1 μrad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.
Reference Key
qian2011internationalscanning Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Shinan Qian
Journal Journal of environmental sciences (China)
Year 2011
DOI
10.1155/2011/902158
URL
http://dx.doi.org/10.1155/2011/902158
Keywords
optics light

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