scanning optical head with nontilted reference beam: assuring nanoradian accuracy for a new generation surface profiler in the large-slope testing range
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2011
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Abstract
Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of ∼1 μrad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.
| Reference Key |
qian2011internationalscanning
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|---|---|
| Authors | ;Shinan Qian |
| Journal | Journal of environmental sciences (China) |
| Year | 2011 |
| DOI |
10.1155/2011/902158
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