dynamic analysis of multilayers based mems resonators

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ID: 165439
2017
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Abstract
The dynamic behavior of a microelectromechanical system (MEMS) parallel and electrically coupled double-layers (microbeams) based resonator is investigated. Two numerical methods were used to solve the dynamical problem: the reduced-order modeling (ROM) and the perturbation method. The ROM was derived using the so-called Galerkin expansion with considering the linear undamped mode shapes of straight beam as the basis functions. The perturbation method was generated using the method of multiple scales by direct attack of the equations of motion. Dynamic analyses, assuming the above two numerical methods were performed, and a comparison of the results showed good agreement. Finally, a parametric study was performed using the perturbation on different parameters and the results revealed different interesting features, which hopefully can be useful for some MEMS based applications.
Reference Key
ouakad2017mathematicaldynamic Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Hassen M. Ouakad;Abdulrahman M. Alofi;Ali H. Nayfeh
Journal journal of power sources
Year 2017
DOI
10.1155/2017/1262650
URL
http://dx.doi.org/10.1155/2017/1262650
Keywords
civil engineering (general)mathematics engineering (general)

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