removal properties of low-thermal-expansion materials with rotating-sphere elastic emission machining

Clicks: 253
ID: 157631
2007
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Abstract
Optical mirrors used in extreme ultraviolet lithography systems require a figure accuracy and a roughness of about 0.1 nm rms. In addition, mirror substrates must be low-thermal-expansion materials. Thus, in this study, we processed two low-thermal-expansion materials, ULE [K. Hrdina, B. Hanson, P. Fenn, R. Sabia, Proc. SPIE 4688 (2002) 454.] (Corning Inc.) and Zerodur [I. Mitra, M.J. Davis, J. Alkemper, Rolf Müller, H. Kohlmann, L. Aschke, E. Mörsen, S. Ritter, H. Hack, W. Pannhorst, Proc. SPIE 4688 (2002) 462.] (SCHOTT AG), with elastic emission machining (EEM) in order to evaluate the removal properties. Consequently, we successfully calculated the respective removal rates, because removal volumes were found to be proportional to process times in EEM. Moreover, we demonstrated that the surface roughness of Zerodur is reduced to 0.1 nm rms in the spatial wavelength range from 100 μm to 1 mm.
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Authors ;Masahiko Kanaoka et al
Journal ieee control systems letters
Year 2007
DOI
DOI not found
URL
http://www.iop.org/EJ/abstract/1468-6996/8/3/A09
Keywords
materials of engineering and construction mechanics of materialsbiotechnology

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