low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching

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ID: 143790
2016
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Ranked #52 of 68 articles by views in International journal of infectious diseases : IJID : official publication of the International Society for Infectious Diseases

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Abstract
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.
Reference Key
debnath2016frontierslow-loss Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Kapil Debnath;Ali Z Khokhar;Stuart A Boden;Hideo Arimoto;Swe Zin Oo;Harold M H Chong;Graham Trevor Reed;Shinichi Saito
Journal International journal of infectious diseases : IJID : official publication of the International Society for Infectious Diseases
Year 2016
DOI
10.3389/fmats.2016.00051
URL
http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full
Keywords
waveguide silicon photonics

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