fabricating 90 nm resolution structures in sol-gel silica optical waveguides for biosensor applications
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ID: 134747
2017
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Abstract
Bragg grating structure in a sol-gel silica waveguide is fabricated on the basis of nanoimprint lithography for biophotonic applications. The process realizes nonstandardized lithography in sol-gel silica at a high resolution for a relatively large area in the range of several micrometers with a resolution in the order of several nanometers. Here we demonstrate structures of 250 and 90 nm resolutions in a sol-gel silica optical waveguide for a large area that is not optimized to date. Bragg grating of a 250 nm periodic structure is realized for a 1 mm long area.
| Reference Key |
enami2017journalfabricating
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|---|---|
| Authors | ;Yasufumi Enami |
| Journal | BMC infectious diseases |
| Year | 2017 |
| DOI |
10.1155/2017/4198485
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| URL | |
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