mechanically-tunable photonic devices with on-chip integrated mems/nems actuators

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ID: 131284
2016
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Abstract
This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.
Reference Key
du2016micromachinesmechanically-tunable Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Han Du;Fook Siong Chau;Guangya Zhou
Journal chemistryopen
Year 2016
DOI
10.3390/mi7040069
URL
http://www.mdpi.com/2072-666X/7/4/69
Keywords
plasmonics mems nems metamaterials optomechanicsmechanical engineering and machinery

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