2D Thin Film Temperature Sensors Fabricated onto 3D Nylon Yarn Surface for Smart Textile Applications

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Abstract
We report on micro fabrication methods used to integrate electronics into smart textiles. We have introduced a shadow mask fabrication method to pattern 2D thin film structures onto the 3D surface of yarn. We have demonstrated the fabrication of gold resistance temperature sensors (RTDs) onto 500 μm thick nylon yarn. The sensors are meander shaped and have lateral dimensions of 0.3 mm × 1 mm and the width and spacing of the meander is 20 μm. Two different fabrication methods are developed and evaluated: 1) a planar mask made of Kapton foil is patterned by dry etching and 2) a tube mask made of Kapton foil is patterned with a laser. Both methods have proven to be suitable for the fabrication of RTDs onto textile yarns. The fabricated sensors are measured in a climate chamber from 15 to 50°C. The temperature coefficient of the RTDs is 0.0026 ω/°C with a sensitivity of 0.74 ω/°C.
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Authors Thomas Kinkeldei;Claude Denier;Christoph Zysset;Niko Muenzenrieder;Gerhard Troester;
Journal research journal of textile and apparel
Year Year not found
DOI
1560-6074
URL
https://doi.org/10.1108/rjta-17-02-2013-b003
Keywords
temperature sensor thin films smart textiles 3d micro fabrication temperature sensor thin films smart textiles 3d micro fabrication

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