Contactless Measurements of Carrier Concentrations in InGaAs Layers for Utilizing in InP-Based Quantum Cascade Lasers by Employing Optical Spectroscopy

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ID: 112805
2020
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Abstract
The precise determination of carrier concentration in doped semiconductor materials and nanostructures is of high importance. Many parameters of an operational device are dependent on the proper carrier concentration or its distribution in both the active area as well as in the passive parts as the waveguide claddings. Determining those in a nondestructive manner is, on the one hand, demanded for the fabrication process efficiency, but on the other, challenging experimentally, especially for complex multilayer systems. Here, we present the results of carrier concentration determination in In0.53Ga0.47As layers, designed to be a material forming quantum cascade laser active areas, using a direct and contactless method utilizing the Berreman effect, and employing Fourier-transform infrared (FTIR) spectroscopy. The results allowed us to precisely determine the free carrier concentration versus changes in the nominal doping level and provide feedback regarding the technological process by indicating the temperature adjustment of the dopant source.
Reference Key
motyka2020materialscontactless Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Marcin Kurka,Michał Rygała,G. Sęk,Piotr Gutowski,Kamil Pierściński,Marcin Motyka;Marcin Kurka;Michał Rygała;G. Sęk;Piotr Gutowski;Kamil Pierściński;Marcin Motyka;
Journal Materials (Basel, Switzerland)
Year 2020
DOI
10.3390/ma13143109
URL
https://sciprofiles.com/publication/view/65a43a26f96829544045bd0274e9adda
Keywords
gas sensing mid-infrared quantum cascade lasers carrier concentration berreman effect gas sensing mid-infrared quantum cascade lasers carrier concentration berreman effect National Center for Biotechnology Information NCBI NLM MEDLINE pubmed abstract nih national institutes of health national library of medicine pmid:32664660 pmc7412041 doi:10.3390/ma13143109 marcin kurka michał rygała marcin motyka

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