Epitaxy from a Periodic Y–O Monolayer: Growth of Single-Crystal Hexagonal YAlO3 Perovskite

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ID: 110564
2020
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Abstract
The role of an atomic-layer thick periodic Y–O array in inducing the epitaxial growth of single-crystal hexagonal YAlO3 perovskite (H-YAP) films was studied using high-angle annular dark-field and annular bright-field scanning transmission electron microscopy in conjunction with a spherical aberration-corrected probe and in situ reflection high-energy electron diffraction. We observed the Y–O array at the interface of amorphous atomic layer deposition (ALD) sub-nano-laminated (snl) Al2O3/Y2O3 multilayers and GaAs(111)A, with the first film deposition being three cycles of ALD-Y2O3. This thin array was a seed layer for growing the H-YAP from the ALD snl multilayers with 900 °C rapid thermal annealing (RTA). The annealed film only contained H-YAP with an excellent crystallinity and an atomically sharp interface with the substrate. The initial Y–O array became the bottom layer of H-YAP, bonding with Ga, the top layer of GaAs. Using a similar ALD snl multilayer, but with the first film deposition of three ALD-Al2O3 cycles, there was no observation of a periodic atomic array at the interface. RTA of the sample to 900 °C resulted in a non-uniform film, mixing amorphous regions and island-like H-YAP domains. The results indicate that the epitaxial H-YAP was induced from the atomic-layer thick periodic Y–O array, rather than from GaAs(111)A.
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Authors Minghwei Hong;Chao-Kai Cheng;Yen-Hsun Lin;Lawrence Boyu Young;Ren-Fong Cai;Chia-Hung Hsu;Chien-Ting Wu;Jueinai Kwo;Hong, Minghwei;Cheng, Chao-Kai;Lin, Yen-Hsun;Young, Lawrence Boyu;Cai, Ren-Fong;Hsu, Chia-Hung;Wu, Chien-Ting;Kwo, Jueinai;
Journal Nanomaterials
Year 2020
DOI
10.3390/nano10081515
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