Deconstructing energy use in microelectronics manufacturing: An experimental case study of a MEMS fabrication facility

Clicks: 201
ID: 66529
2010
Reference Key
branham2010deconstructingenvironmental Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Branham, M.
Journal environmental science and technology
Year 2010
DOI 10.1021/es902388b
URL
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