Fabrication of nanocrystallites in the SiOx matrix applicable in microelectronics Krakow
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ID: 66524
2013
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kolodzieja2013fabricationproceedings
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| Authors | Kolodzieja, T. |
| Journal | proceedings of spie - the international society for optical engineering |
| Year | 2013 |
| DOI | 10.1117/12.2031295 |
| URL | |
| Keywords | Keywords not found |
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