Bonding of silicon scanning mirror having vertical comb fingers
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ID: 273435
2002
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jeon2002journalbonding
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| Authors | Jin-Ho Lee,Young-Chul Ko,Byoung-So Choi,Jong-Min Kim,Duk Young Jeon;Jin-Ho Lee;Young-Chul Ko;Byoung-So Choi;Jong-Min Kim;Duk Young Jeon; |
| Journal | journal of micromechanics and microengineering |
| Year | 2002 |
| DOI | 10.1088/0960-1317/12/5/320 |
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